8713型气体质量流量控制器 (MFC) burkert

类型描述

8713 型质量流量控制器 (MFC) 适合在大流量范围内对气体进行质量流量控制。直接位于气流中的热 MEMS 传感器可以实现极高速度的响应。一个直动式 Bürkert 比例阀作为执行元件，确保了良好的响应灵敏度。集成 PI 控制器，令 MFC 具备卓越的控制特性。8713 型设备可以针对两种不同的气体进行校准，用户可以在两者之间进行切换。与上级设备的通信完全采用数字形式，这样一来，就可以省去额外的数模转换。8713 型质量流量控制器适合多样化应用，例如燃烧器控制、热处理、材料涂层、生物反应堆、燃料电池技术或者试验台。

（1）标称流量范围：0.010 lN/min 至 80 lN/min

（2）测量精度和重复性高

（3）调控速度特别快

（4）通过 RS485 进行数字通信

（5）紧凑型版本

 

类型 8713 - Mass Flow Controller for Gases (MFC)

类型描述

The mass flow controller (MFC) type 8713 is suited for regulating the mass flow of gases over a big flow range. The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times. A direct-acting proportional valve from Bürkert guarantees a high sensitivity. The integrated PI controller ensures outstanding control characteristics of the MFC. Type 8713 can optionally be calibrated for two different gases; the user can switch between these two gases. The communication with master devices is fully digital, therefore no further analog/digital conversions are needed. The mass flow controller type 8713 fits for various applications, like e.g. burner controls, heat treatment, material coatings, bio reactors, fuel cell technology or test benches.

Nominal flow ranges from 0.010 lN/min to 80 lN/min

High accuracy and repeatability

Very fast settling times

Digital communication via RS485

Compact version